JPH0480044U - - Google Patents
Info
- Publication number
- JPH0480044U JPH0480044U JP12564290U JP12564290U JPH0480044U JP H0480044 U JPH0480044 U JP H0480044U JP 12564290 U JP12564290 U JP 12564290U JP 12564290 U JP12564290 U JP 12564290U JP H0480044 U JPH0480044 U JP H0480044U
- Authority
- JP
- Japan
- Prior art keywords
- susceptor
- groove
- silicon wafer
- depositing
- side walls
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 2
- 229910052710 silicon Inorganic materials 0.000 claims description 2
- 239000010703 silicon Substances 0.000 claims description 2
- 239000005380 borophosphosilicate glass Substances 0.000 claims 1
- 238000000151 deposition Methods 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12564290U JPH0480044U (en]) | 1990-11-27 | 1990-11-27 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12564290U JPH0480044U (en]) | 1990-11-27 | 1990-11-27 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0480044U true JPH0480044U (en]) | 1992-07-13 |
Family
ID=31873233
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12564290U Pending JPH0480044U (en]) | 1990-11-27 | 1990-11-27 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0480044U (en]) |
-
1990
- 1990-11-27 JP JP12564290U patent/JPH0480044U/ja active Pending